Designing an agentic AI workflow for structured information extraction from scientific text: A case study on atomic layer deposition of ZnO and IGZO (2026)
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1116/6.0005366
Publication URI: http://dx.doi.org/10.1116/6.0005366
Type: Journal Article/Review
Parent Publication: Journal of Vacuum Science & Technology A
Issue: 3