Patterning of platinum (Pt) thin films by chemical wet etching in Aqua Regia (2012)
Attributed to:
Microseismometer for ExoMars 10/2008 - 3/2009
funded by
STFC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1088/0960-1317/22/6/067001
Publication URI: http://dx.doi.org/10.1088/0960-1317/22/6/067001
Type: Journal Article/Review
Parent Publication: Journal of Micromechanics and Microengineering
Issue: 6