Patterning of platinum (Pt) thin films by chemical wet etching in Aqua Regia (2012)

First Author: Köllensperger P

Attributed to: Microseismometer for ExoMars 04/2009 - 6/2009 funded by STFC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/0960-1317/22/6/067001

Publication URI: http://dx.doi.org/10.1088/0960-1317/22/6/067001

Type: Journal Article/Review

Parent Publication: Journal of Micromechanics and Microengineering

Issue: 6