Extension sensing of piezo actuators using time-domain ultrasonic measurement and frequency-domain impedance measurement (2011)
Attributed to:
Cryogenic miniature deformable mirror with position sensing
funded by
STFC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1007/s10832-011-9647-6
Publication URI: http://dx.doi.org/10.1007/s10832-011-9647-6
Type: Journal Article/Review
Parent Publication: Journal of Electroceramics
Issue: 1