3D active edge silicon sensors: Device processing, yield and QA for the ATLAS-IBL production (2013)

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.nima.2012.05.070

Publication URI: http://dx.doi.org/10.1016/j.nima.2012.05.070

Type: Journal Article/Review

Parent Publication: Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment