The Control of Shrinkage and Thermal Instability in SU-8 Photoresists for Holographic Lithography (2011)
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1002/adfm.201002653
Publication URI: http://dx.doi.org/10.1002/adfm.201002653
Type: Journal Article/Review
Parent Publication: Advanced Functional Materials
Issue: 9