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Time-Resolved Ionisation Studies of the High Power Impulse Magnetron Discharge in Mixed Argon and Nitrogen Atmosphere (2007)

First Author: Ehiasarian A

Attributed to: Fundamentals of High Power Impulse Magnetron Sputtering (HIPIMS) - Plasma Studies and Materials Synthesis funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1002/ppap.200730806

Publication URI: http://dx.doi.org/10.1002/ppap.200730806

Type: Journal Article/Review

Parent Publication: Plasma Processes and Polymers

Issue: S1