Cathode Current Density Distributions in High Power Impulse and Direct Current Magnetron Sputtering Modes (2009)

First Author: Clarke G
Attributed to:  A New Route to high-Performance Functional Films on Polymeric Web funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1002/ppap.200931201

Publication URI: http://dx.doi.org/10.1002/ppap.200931201

Type: Journal Article/Review

Parent Publication: Plasma Processes and Polymers

Issue: S1