Measurements of Deposition Rate and Substrate Heating in a HiPIMS Discharge (2009)
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1002/ppap.200931202
Publication URI: http://dx.doi.org/10.1002/ppap.200931202
Type: Journal Article/Review
Parent Publication: Plasma Processes and Polymers
Issue: S1