Measurements of Deposition Rate and Substrate Heating in a HiPIMS Discharge (2009)

First Author: West G

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1002/ppap.200931202

Publication URI: http://dx.doi.org/10.1002/ppap.200931202

Type: Journal Article/Review

Parent Publication: Plasma Processes and Polymers

Issue: S1