Negative Ion Density Measurements in Reactive Magnetron Sputtering (2009)

First Author: Dodd R
Attributed to:  The Study of Magnetized Electronegative Depositing Plasmas funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1002/ppap.200931606

Publication URI: http://dx.doi.org/10.1002/ppap.200931606

Type: Journal Article/Review

Parent Publication: Plasma Processes and Polymers

Issue: S1