High-density remote plasma sputtering of high-dielectric-constant amorphous hafnium oxide films (2013)
Attributed to:
Printed Logic Supply Chain (FlexIC) - TSB App. No. 155
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1002/pssb.201248520
Publication URI: http://dx.doi.org/10.1002/pssb.201248520
Type: Journal Article/Review
Parent Publication: physica status solidi (b)
Issue: 5