Localised laser joining of glass to silicon with BCB intermediate layer (2009)
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1007/s00542-009-0879-1
Publication URI: http://dx.doi.org/10.1007/s00542-009-0879-1
Type: Journal Article/Review
Parent Publication: Microsystem Technologies
Issue: 7