Chemical mechanical polishing of thin film diamond (2014)
Attributed to:
Nanocrystalline diamond for Micro-Electro-Mechanical Systems (MEMS)
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1016/j.carbon.2013.11.023
Publication URI: http://dx.doi.org/10.1016/j.carbon.2013.11.023
Type: Journal Article/Review
Parent Publication: Carbon