Technological shifts in surface metrology (2012)

First Author: Jiang X

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.cirp.2012.05.009

Publication URI: http://dx.doi.org/10.1016/j.cirp.2012.05.009

Type: Journal Article/Review

Parent Publication: CIRP Annals

Issue: 2