Ultra-violet light assisted reactive RF magnetron sputtering deposition of AlN thin films at room temperature (2012)
Abstract
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Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1016/j.matlet.2012.03.083
Publication URI: http://dx.doi.org/10.1016/j.matlet.2012.03.083
Type: Journal Article/Review
Parent Publication: Materials Letters