Manufacture of micro-sensors and actuators for flow control (2006)

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.mee.2006.01.171

Publication URI: http://dx.doi.org/10.1016/j.mee.2006.01.171

Type: Journal Article/Review

Parent Publication: Microelectronic Engineering

Issue: 4-9