Printed circuit board as a MEMS platform for focused ion beam technology (2011)
Attributed to:
The Casimir Force in Complex Topologies and its Utility in Nanomachines
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1016/j.mee.2010.09.017
Publication URI: http://dx.doi.org/10.1016/j.mee.2010.09.017
Type: Journal Article/Review
Parent Publication: Microelectronic Engineering
Issue: 1