Printed circuit board as a MEMS platform for focused ion beam technology (2011)

First Author: Cheneler D

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.mee.2010.09.017

Publication URI: http://dx.doi.org/10.1016/j.mee.2010.09.017

Type: Journal Article/Review

Parent Publication: Microelectronic Engineering

Issue: 1