Remote plasma enhanced atomic layer deposition of ZnO for thin film electronic applications (2012)
Attributed to:
Silicon Nanowire Arrays for Viral Infection Markers
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1016/j.mee.2012.04.019
Publication URI: http://dx.doi.org/10.1016/j.mee.2012.04.019
Type: Journal Article/Review
Parent Publication: Microelectronic Engineering