Diamond underlayer microstructure effect on the orientation of AlN piezoelectric layers for high frequency SAW resonators by TEM (2013)
Attributed to:
Nanocrystalline diamond for Micro-Electro-Mechanical Systems (MEMS)
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1016/j.mee.2013.04.007
Publication URI: http://dx.doi.org/10.1016/j.mee.2013.04.007
Type: Journal Article/Review
Parent Publication: Microelectronic Engineering