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Diamond underlayer microstructure effect on the orientation of AlN piezoelectric layers for high frequency SAW resonators by TEM (2013)

First Author: Lloret F

Attributed to: Small items of research equipment at Cardiff University funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.mee.2013.04.007

Publication URI: http://dx.doi.org/10.1016/j.mee.2013.04.007

Type: Journal Article/Review

Parent Publication: Microelectronic Engineering