High precision pressure sensors based on SAW devices in the GHz range (2013)
Attributed to:
Nanocrystalline diamond for Micro-Electro-Mechanical Systems (MEMS)
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1016/j.sna.2012.09.012
Publication URI: http://dx.doi.org/10.1016/j.sna.2012.09.012
Type: Journal Article/Review
Parent Publication: Sensors and Actuators A: Physical