O- density measurements in the pulsed-DC reactive magnetron sputtering of titanium (2010)

First Author: Dodd R
Attributed to:  The Study of Magnetized Electronegative Depositing Plasmas funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.tsf.2010.06.056

Publication URI: http://dx.doi.org/10.1016/j.tsf.2010.06.056

Type: Journal Article/Review

Parent Publication: Thin Solid Films

Issue: 5