Deposition of c-axis orientation aluminum nitride films on flexible polymer substrates by reactive direct-current magnetron sputtering (2012)
Abstract
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Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1016/j.tsf.2012.03.015
Publication URI: http://dx.doi.org/10.1016/j.tsf.2012.03.015
Type: Journal Article/Review
Parent Publication: Thin Solid Films
Issue: 15