Ti3SiC2-formation during Ti-C-Si multilayer deposition by magnetron sputtering at 650 °C (2013)
Abstract
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Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1016/j.vacuum.2013.01.003
Publication URI: http://dx.doi.org/10.1016/j.vacuum.2013.01.003
Type: Journal Article/Review
Parent Publication: Vacuum