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Precursors for MOCVD and ALD of rare earth oxides-complexes of the early lanthanides with a donor-functionalized alkoxide ligand. (2007)

First Author: Aspinall HC

Attributed to: Liquid injection ALD of Cp- based precursors for deposition of dielectric materials funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1021/ic061382y

PubMed Identifier: 17580930

Publication URI: http://europepmc.org/abstract/MED/17580930

Type: Journal Article/Review

Volume: 46

Parent Publication: Inorganic chemistry

Issue: 15

ISSN: 0020-1669