Precursors for MOCVD and ALD of rare earth oxides-complexes of the early lanthanides with a donor-functionalized alkoxide ligand. (2007)
Attributed to:
Liquid injection ALD of Cp- based precursors for deposition of dielectric materials
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1021/ic061382y
PubMed Identifier: 17580930
Publication URI: http://europepmc.org/abstract/MED/17580930
Type: Journal Article/Review
Volume: 46
Parent Publication: Inorganic chemistry
Issue: 15
ISSN: 0020-1669