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Influence of the plasma sheath on plasma polymer deposition in advance of a mask and down pores. (2009)

First Author: Zelzer M

Attributed to: Physical Organic Chemistry: Opportunities in Synthesis, Materials and Pharmaceuticals funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1021/jp902137y

PubMed Identifier: 19485403

Publication URI: http://europepmc.org/abstract/MED/19485403

Type: Journal Article/Review

Volume: 113

Parent Publication: The journal of physical chemistry. B

Issue: 25

ISSN: 1520-5207