Fabrication and quality factor control of a microelectromechanical system resonator with linear differential drive (2010)

First Author: Anthony C
Attributed to:  Exploiting emergent collective behaviours in complex large MEMS systems funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1049/iet-smt.2009.0081

Publication URI: http://dx.doi.org/10.1049/iet-smt.2009.0081

Type: Journal Article/Review

Parent Publication: IET Science, Measurement & Technology

Issue: 4