Plasma power measurement and hysteresis in the E-H transition of a rf inductively coupled plasma system (2008)

First Author: Daltrini A

Attributed to: Queen's University Belfast Plasma Physics funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1063/1.2844885

Publication URI: http://dx.doi.org/10.1063/1.2844885

Type: Journal Article/Review

Parent Publication: Applied Physics Letters

Issue: 6