Actively stabilized optical fiber interferometry technique for online/in-process surface measurement. (2008)

First Author: Wang K
Attributed to:  A chip device for on-line assessment in nano-scale surface manufacture funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1063/1.2870085

PubMed Identifier: 18315285

Publication URI: http://europepmc.org/abstract/MED/18315285

Type: Journal Article/Review

Volume: 79

Parent Publication: The Review of scientific instruments

Issue: 2 Pt 1

ISSN: 0034-6748