Silicon depletion layer actuators (2008)

First Author: Ransley J

Attributed to: Enhanced Silicon Microresonator Oscillators funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1063/1.2920440

Publication URI: http://dx.doi.org/10.1063/1.2920440

Type: Journal Article/Review

Parent Publication: Applied Physics Letters

Issue: 18