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The role of the relative voltage and phase for frequency coupling in a dual-frequency capacitively coupled plasma (2008)

First Author: O'Connell D

Attributed to: Queen's University Belfast Plasma Physics funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1063/1.2972117

Publication URI: http://dx.doi.org/10.1063/1.2972117

Type: Journal Article/Review

Parent Publication: Applied Physics Letters

Issue: 8