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The role of carbon contamination in voltage linearity and leakage current in high-k metal-insulator-metal capacitors (2008)

First Author: Miao B

Attributed to: Technologies for SiC electronics and sensors in extreme environments funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1063/1.2973687

Publication URI: http://dx.doi.org/10.1063/1.2973687

Type: Journal Article/Review

Parent Publication: Journal of Applied Physics

Issue: 5