The role of oxygen in secondary electron contrast in doped semiconductors using low voltage scanning electron microscopy (2008)

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1063/1.3039804

Publication URI: http://dx.doi.org/10.1063/1.3039804

Type: Journal Article/Review

Parent Publication: Journal of Applied Physics

Issue: 12