Dielectric relaxation of lanthanum doped zirconium oxide (2009)
Attributed to:
Liquid injection ALD of Cp- based precursors for deposition of dielectric materials
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1063/1.3078038
Publication URI: http://dx.doi.org/10.1063/1.3078038
Type: Journal Article/Review
Parent Publication: Journal of Applied Physics
Issue: 4