High-k (k=30) amorphous hafnium oxide films from high rate room temperature deposition (2011)
Attributed to:
FIREBIRD: Fully Integrated Bidirectional Infrared Displays
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1063/1.3601487
Publication URI: http://dx.doi.org/10.1063/1.3601487
Type: Journal Article/Review
Parent Publication: Applied Physics Letters
Issue: 25