Energetic electron avalanches and mode transitions in planar inductively coupled radio-frequency driven plasmas operated in oxygen (2011)

First Author: Zaka-Ul-Islam M

Attributed to: Queen's University Belfast Plasma Physics funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1063/1.3612914

Publication URI: http://dx.doi.org/10.1063/1.3612914

Type: Journal Article/Review

Parent Publication: Applied Physics Letters

Issue: 4