Top-down fabrication of single crystal silicon nanowire using optical lithography (2012)

First Author: Za'bah N
Attributed to:  Nano Lab Cross Disciplinary Feasibility Account funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1063/1.4737463

Publication URI: http://dx.doi.org/10.1063/1.4737463

Type: Journal Article/Review

Parent Publication: Journal of Applied Physics

Issue: 2