A study of the plasma electronegativity in an argon-oxygen pulsed-dc sputter magnetron (2010)

First Author: You S
Attributed to:  The Study of Magnetized Electronegative Depositing Plasmas funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/0022-3727/43/50/505205

Publication URI: http://dx.doi.org/10.1088/0022-3727/43/50/505205

Type: Journal Article/Review

Parent Publication: Journal of Physics D: Applied Physics

Issue: 50