Reduced microwave attenuation in coplanar waveguides using deep level impurity compensated Czochralski-silicon substrates (2011)

First Author: Abuelgasim A
Attributed to:  Semi-insulating Silicon substrates for high frequency integrated circuits funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/0268-1242/26/7/072001

Publication URI: http://dx.doi.org/10.1088/0268-1242/26/7/072001

Type: Journal Article/Review

Parent Publication: Semiconductor Science and Technology

Issue: 7