A novel pitch evaluation of one-dimensional gratings based on a cross-correlation filter (2014)

First Author: Chen X
Attributed to:  EPSRC Centre for Innovative Manufacturing in Advanced Metrology funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/0957-0233/25/4/044007

Publication URI: http://dx.doi.org/10.1088/0957-0233/25/4/044007

Type: Journal Article/Review

Parent Publication: Measurement Science and Technology

Issue: 4