Material sensitive scanning probe microscopy of subsurface semiconductor nanostructures via beam exit Ar ion polishing (2011)
Attributed to:
Non-Destructive Nanoscale Resolution using a Carbon Nanotube Scanning Thermal Probe
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1088/0957-4484/22/18/185702
PubMed Identifier: 21415470
Publication URI: http://europepmc.org/abstract/MED/21415470
Type: Journal Article/Review
Parent Publication: Nanotechnology
Issue: 18
ISSN: 0957-4484