Material sensitive scanning probe microscopy of subsurface semiconductor nanostructures via beam exit Ar ion polishing (2011)

First Author: Kolosov O

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/0957-4484/22/18/185702

PubMed Identifier: 21415470

Publication URI: http://europepmc.org/abstract/MED/21415470

Type: Journal Article/Review

Parent Publication: Nanotechnology

Issue: 18

ISSN: 0957-4484