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Force feedback linearization for higher-order electromechanical sigma-delta modulators (2006)

First Author: Dong Y

Attributed to: Advanced and Intelligent Interface Circuits for Capacitive MEMS Sensors - The E and S in MEMS funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/0960-1317/16/6/s09

Publication URI: http://dx.doi.org/10.1088/0960-1317/16/6/s09

Type: Journal Article/Review

Parent Publication: Journal of Micromechanics and Microengineering

Issue: 6