Silicon comb-drive actuators for low-temperature tuning of superconducting microwave circuits (2008)

First Author: Prest M
Attributed to:  Millimetre wave micromachined devices for communications and radar funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/0960-1317/18/12/125003

Publication URI: http://dx.doi.org/10.1088/0960-1317/18/12/125003

Type: Journal Article/Review

Parent Publication: Journal of Micromechanics and Microengineering

Issue: 12