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Issues associated with scaling up production of a lab demonstrated MEMS mass sensor (2012)

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/0960-1317/22/11/115032

Publication URI: http://dx.doi.org/10.1088/0960-1317/22/11/115032

Type: Journal Article/Review

Parent Publication: Journal of Micromechanics and Microengineering

Issue: 11

ISSN: 0960-1317