Issues associated with scaling up production of a lab demonstrated MEMS mass sensor (2012)
Abstract
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Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1088/0960-1317/22/11/115032
Publication URI: http://dx.doi.org/10.1088/0960-1317/22/11/115032
Type: Journal Article/Review
Parent Publication: Journal of Micromechanics and Microengineering
Issue: 11
ISSN: 0960-1317