Design, fabrication and characterization of a piezoelectric MEMS diaphragm resonator mass sensor (2013)

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/0960-1317/23/12/125019

Publication URI: http://dx.doi.org/10.1088/0960-1317/23/12/125019

Type: Journal Article/Review

Parent Publication: Journal of Micromechanics and Microengineering

Issue: 12