Design, fabrication and characterization of a piezoelectric MEMS diaphragm resonator mass sensor (2013)
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1088/0960-1317/23/12/125019
Publication URI: http://dx.doi.org/10.1088/0960-1317/23/12/125019
Type: Journal Article/Review
Parent Publication: Journal of Micromechanics and Microengineering
Issue: 12