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Plasma boundary sheath in the afterglow of a pulsed inductively coupled RF plasma (2007)

First Author: Osiac M

Attributed to: Queen's University Belfast Plasma Physics funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/0963-0252/16/2/019

Publication URI: http://dx.doi.org/10.1088/0963-0252/16/2/019

Type: Journal Article/Review

Parent Publication: Plasma Sources Science and Technology

Issue: 2