A Langmuir probe system incorporating the Boyd-Twiddy method for EEDF measurement applied to an inductively coupled plasma source (2009)

First Author: Crowley B

Attributed to: UK Fusion Programme 2008-2010 funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/0963-0252/18/1/014010

Publication URI: http://dx.doi.org/10.1088/0963-0252/18/1/014010

Type: Journal Article/Review

Parent Publication: Plasma Sources Science and Technology

Issue: 1