Negative ion density measurements in a reactive dc magnetron using the eclipse photodetachment method (2010)

First Author: Dodd R
Attributed to:  The Study of Magnetized Electronegative Depositing Plasmas funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/0963-0252/19/1/015021

Publication URI: http://dx.doi.org/10.1088/0963-0252/19/1/015021

Type: Journal Article/Review

Parent Publication: Plasma Sources Science and Technology

Issue: 1