The influence of the relative phase between the driving voltages on electron heating in asymmetric dual frequency capacitive discharges (2010)

First Author: Ziegler D

Attributed to: Queen's University Belfast Plasma Physics funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/0963-0252/19/4/045001

Publication URI: http://dx.doi.org/10.1088/0963-0252/19/4/045001

Type: Journal Article/Review

Parent Publication: Plasma Sources Science and Technology

Issue: 4